SHANGHAI ROYAL TECHNOLOGY INC.
| Payment Terms | L/C, T/T |
| Supply Ability | 10 sets per month |
| Delivery Time | 10 to 12 weeks |
| Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
| Technology | DC magnetron sputtering, PVD sputtering deposition, PVD vacuum coating |
| Applications | conductive film deposition, corrosion resistance film coating |
| Properties | Robust and high volume design machine |
| Sputtering targets | Ni, Cr, Cu, Au, Ag, Ta, Ti, SS, Al etc. pure metals |
| Factory Location | Shanghai city, China |
| Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America |
| Training Service | Machine operation, maintenance, coating process Recipes, program |
| Warranty | Limited warranty 1 year for free, whole life for machine |
| OEM & ODM | available, we support tailor made design and fabrication |
| Brand Name | ROYAL |
| Model Number | RTAS |
| Certification | CE |
| Place of Origin | China |
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Product Specification
| Payment Terms | L/C, T/T | Supply Ability | 10 sets per month |
| Delivery Time | 10 to 12 weeks | Packaging Details | Export standard, to be packed in new cases/cartons, suitable for long-distance ocean/air and inland transportation. |
| Technology | DC magnetron sputtering, PVD sputtering deposition, PVD vacuum coating | Applications | conductive film deposition, corrosion resistance film coating |
| Properties | Robust and high volume design machine | Sputtering targets | Ni, Cr, Cu, Au, Ag, Ta, Ti, SS, Al etc. pure metals |
| Factory Location | Shanghai city, China | Worldwide Service | Poland - Europe; Iran- West Asia & Middle East, Turkey, India, Mexico- South America |
| Training Service | Machine operation, maintenance, coating process Recipes, program | Warranty | Limited warranty 1 year for free, whole life for machine |
| OEM & ODM | available, we support tailor made design and fabrication | Brand Name | ROYAL |
| Model Number | RTAS | Certification | CE |
| Place of Origin | China | ||
| High Light | thin film coating equipment ，dlc coating equipment | ||
Circuit Board Conductive Thin Film Deposition by PVD DC Sputtering Process, Copper plating, Au Sputteringdeposition
------Large Capacity, Flexible Modules Design, Precised Manufacturing.
Technical Advantages:
The DPC-RTAS1215+ Sputtering system is the upgraded version of the original ASC1215 model, the newest system has several advantages:
Higher Efficient Process:
1. Double sided coating is available by turnover fixture design
2. Up to 8 standard planar cathode flanges for multiple sources
3. Large capacity up to 2.2 ㎡ ceramic chips per cycle
4. Fully Automation, PLC+Touch Screen, ONE-touch control system
Lower Production Cost:
1. Equipped with 2 magnetic suspension molecular pumps, fast starting time, free maintenance;
2. Maximum heating power;
3. Octagonal shape of chamber for optimum space using, up to 8 arc sources and 4 sputtering cathodes for fast deposition of coatings
The DPC process- Direct Plating Copper is an advanced coating technology applied with LED and semiconductors in electronic industries. One typical application is Ceramic Radiating Substrate. Copper conductive film deposition on Aluminum Oxide (Al2O3), AlN substrates by PVD vacuum sputtering technology, has above all one big advantage compared to traditional manufacturing methods: DBC LTCC HTCC have much lower production costs.
Royal Technology’s team collaborated with our customer to develop the DPC process successfully applying PVD sputtering technology.
Applications of DPC:
HBLED
Substrates for solar concentrator cells
Power semiconductor packaging including automotive motor control
Hybrid and electric automobile power management electronics
Packages for RF
Microwave devices
Technical Specifications
| Description | DPC-RTAS1215+ |
| Chamber Height (mm) | 1500 |
| Chamber diameter (mm) | φ1200 |
| Sputtering Cathodes Mounting Flange | 4 |
| Ion Source Mounting Flange | 1 |
| Arc Cathodes Mounting Flange | 8 |
| Satellites (mm) | 16 x Φ150 |
| Pulsed Bias Power (KW) | 36 |
| Sputtering Power (KW) | DC36 + MF36 |
| Arc Power(KW) | 8 x 5 |
| Ion Source Power (KW) | 5 |
| Heating Power (KW) | 36 |
| Effective Coating Height (mm) | 1020 |
| Magnetic Suspension Molecular Pump | 2 x 3300 L/S |
| Roots Pump | 1 x 1000m³/h |
| Rotary Vane Pump | 1 x 300m³/h |
| Holding Pump | 1 x 60m³/h |
| Capacity | 2.2 ㎡ |
| Installation Area ( L x W x H) mm | 4200*6000*3500 |
HMI + Touch Screen Operation System
Please contact us for more specifications, Royal Technology is honored to provide you total coating solutions.
Company Details
Business Type:
Manufacturer
Year Established:
2006
Employee Number:
10~49
Ecer Certification：
Verified Supplier
Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are... Shanghai Royal Technology Inc. was established in 2006, a worldwide supplier of high quality vacuum equipment with key locations around the globe. Research and Development technology are supported by specialized engineers in the United States and China. High-tech machine manufacturing facilities are...
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