Dayoo Advanced Ceramic Co.,Ltd
| Delivery Time | Negotiable |
| Payment Terms | Negotiable |
| Purity | 96%,99% |
| Materials | 92% alumina powder |
| Size | customized |
| Surface Finish | Polished |
| Shape | Customizable |
| Properties | electric insulation |
| Type | ceramic ball |
| Application | Industrial Ceramic |
| Thermal Expansion Coefficient | 8 x 10^-6 /K |
| Tensile Strength | 250 MPa |
| Max Operating Temperature | 1800°C |
| Alumina Content | 92% & 95% |
| Flexural Strength | 350 MPa |
| Maximum Use Temperature | 1,400°C |
| Water Absorption | 0 |
| Place of Origin | Made In China |
| Brand Name | Dayoo |
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Product Specification
| Delivery Time | Negotiable | Payment Terms | Negotiable |
| Purity | 96%,99% | Materials | 92% alumina powder |
| Size | customized | Surface Finish | Polished |
| Shape | Customizable | Properties | electric insulation |
| Type | ceramic ball | Application | Industrial Ceramic |
| Thermal Expansion Coefficient | 8 x 10^-6 /K | Tensile Strength | 250 MPa |
| Max Operating Temperature | 1800°C | Alumina Content | 92% & 95% |
| Flexural Strength | 350 MPa | Maximum Use Temperature | 1,400°C |
| Water Absorption | 0 | Place of Origin | Made In China |
| Brand Name | Dayoo | ||
| High Light | High Temperature Alumina Ceramic ，Customized Alumina Ceramic ，Square Type Alumina Ceramic | ||
This series of semiconductor-specific alumina ceramic components are manufactured using 99.6% ultra-high purity Al₂O₃ material through precision tape casting and high-temperature sintering processes. The products exhibit excellent insulation, corrosion resistance, and dimensional stability, meeting SEMI Standard F47 cleanliness requirements.
Wafer fabrication: Etching machine ceramic parts, diffusion boats
Packaging & testing: Probe card substrates, test sockets
Equipment components: Robot end effectors
Vacuum systems: Electrostatic chuck bases
Optical inspection: Lithography machine ceramic guides
✓ Ultra-clean: Metal ion content <0.1ppm
✓ Precision dimensions: Tolerance ±0.05mm/100mm
✓ Plasma resistance: Etching rate <0.1μm/h
✓ Low outgassing: TML<0.1% CVCM<0.01%
✓ High reliability: Passes 1000 thermal cycles
| Parameter | Specification | Test Standard |
|---|---|---|
| Material Purity | Al₂O₃≥99.6% | GDMS |
| Volume Resistivity | >10¹⁴Ω·cm | ASTM D257 |
| Dielectric Constant | 9.8@1MHz | IEC 60250 |
| Flexural Strength | ≥400MPa | ISO 14704 |
| CTE | 7.2×10⁻⁶/°C | DIN 51045 |
| Surface Roughness | Ra≤0.1μm | ISO 4287 |
| Outgassing | TML<0.1% | ASTM E595 |
Material preparation:
Nano-grade Al₂O₃ powder (D50≤0.5μm)
High-purity ball milling (Y₂O₃-MgO sintering aids)
Forming process:
Tape casting (thickness 0.1-5mm)
Isostatic pressing (200MPa)
Sintering control:
Multi-stage atmosphere sintering (1600°C/H₂)
HIP post-treatment (1500°C/150MPa)
Precision machining:
Laser processing (±5μm)
Ultrasonic drilling (aspect ratio 10:1)
Cleaning & inspection:
Megasonic cleaning (Class 1 cleanroom)
SEMI F47 particle testing
⚠️ Storage: Class 100 clean packaging
⚠️ Installation environment: 23±1°C RH45±5%
⚠️ Cleaning: Semiconductor-grade solvents only
⚠️ Handling: Avoid direct contact with functional surfaces
Cleanliness verification: VDA19 test reports
Failure analysis: SEM/EDS microanalysis
Custom development: DFM co-design
Q: How to ensure wafer contact surface cleanliness?
A: Triple protection:
① Plasma surface activation
② Vacuum packaging + N₂ storage
③ Pre-installation ionized air cleaning
Q: Performance in fluorine-based plasma?
A: Special treated version:
• Etching rate <0.05μm/h
• AlF₃ passivation layer
• 3x longer lifespan
Q: Maximum processable size?
A: Standard 200×200mm, special process up to 400×400mm.
Company Details
Business Type:
Manufacturer,Distributor/Wholesaler,Exporter
Total Annual:
>1000000
Employee Number:
>100
Ecer Certification：
Verified Supplier
We are a company with many years of experience in the production of special precision ceramics and the ability to design, manufacture, process and sell structural and functional parts of various special precision ceramics. Deyu Precision Ceramics Technology Co., Ltd. has many years of e... We are a company with many years of experience in the production of special precision ceramics and the ability to design, manufacture, process and sell structural and functional parts of various special precision ceramics. Deyu Precision Ceramics Technology Co., Ltd. has many years of e...
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