Shanghai Kemike Chemical Co.,Ltd
| Payment Terms | L/C, T/T |
| Supply Ability | 200 Tons/Year |
| Delivery Time | 15 days |
| Packaging Details | Cylinder/Tank |
| Product Name | Tungsten Hexafluoride |
| Transport | By Sea |
| DOT Class | 2.3 |
| Purity | 99.999% |
| Model No. | Tungsten Hexafluoride |
| Transport Package | Sea Transportation |
| Specification | 10L/15kg |
| Trademark | CMC |
| Origin | Suzhou, China |
| CAS No. | 7783-82-6 |
| Formula | Wf6 |
| EINECS | 232-029-1 |
| Constituent | Industrial Pure Air |
| Grade Standard | Industrial Grade |
| Chemical Property | Combustion-Supporting Gas |
| Customization | Available | Customized Request |
| Place of Origin | China |
| Brand Name | CMC |
| Certification | COA |
| Model Number | Wf6 |
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Product Specification
| Payment Terms | L/C, T/T | Supply Ability | 200 Tons/Year |
| Delivery Time | 15 days | Packaging Details | Cylinder/Tank |
| Product Name | Tungsten Hexafluoride | Transport | By Sea |
| DOT Class | 2.3 | Purity | 99.999% |
| Model No. | Tungsten Hexafluoride | Transport Package | Sea Transportation |
| Specification | 10L/15kg | Trademark | CMC |
| Origin | Suzhou, China | CAS No. | 7783-82-6 |
| Formula | Wf6 | EINECS | 232-029-1 |
| Constituent | Industrial Pure Air | Grade Standard | Industrial Grade |
| Chemical Property | Combustion-Supporting Gas | Customization | Available | Customized Request |
| Place of Origin | China | Brand Name | CMC |
| Certification | COA | Model Number | Wf6 |
| High Light | 15kg tungsten hexafluoride gas ，Wf6 tungsten hexafluoride gas ，15kg wf6 gas | ||
Tungsten hexafluoride gas, also known as WF6, is a chemical compound consisting of one tungsten atom and six fluorine atoms. It is a colorless, nonflammable gas with a pungent odor. Tungsten hexafluoride is primarily used in the semiconductor industry for the deposition of tungsten thin films during the manufacturing of integrated circuits and other electronic devices.
Here are some key points about tungsten hexafluoride gas:
Deposition of Tungsten Films: Tungsten hexafluoride is widely employed as a precursor gas in chemical vapor deposition (CVD) processes to deposit tungsten thin films. These films serve as conductive layers in the fabrication of microelectronic devices, such as transistors, interconnects, and gate electrodes.
High Purity and Stability: WF6 gas is typically available in high-purity grades to ensure the quality and integrity of the deposited tungsten films. It exhibits good thermal stability, allowing for controlled and uniform film growth under specific process conditions.
CVD Process: During the CVD process, tungsten hexafluoride gas is introduced into a deposition chamber along with a reducing agent, such as hydrogen gas. The WF6 molecules decompose at elevated temperatures, depositing tungsten atoms onto the substrate surface in a controlled manner.
Safety Considerations: Tungsten hexafluoride is a highly toxic and corrosive gas, requiring careful handling and storage. It reacts violently with water and can release toxic hydrogen fluoride gas. Proper safety measures, including the use of specialized equipment and protective gear, are essential when working with WF6.
Environmental Impact: Like other fluorinated compounds, tungsten hexafluoride has the potential to contribute to environmental concerns. Careful management and disposal practices are necessary to prevent its release into the environment.
It is important to note that tungsten hexafluoride gas is primarily used in industrial and specialized applications, and its handling requires expertise and adherence to safety protocols.
| Test items | Units | Quality requirements | Test results |
| CF4 | ppm | <0.5 | <0.01 |
| O2 | ppm | <0.5 | <0.01 |
| N2 | ppm | <1 | 0.03 |
| CO | ppm | <0.5 | <0.02 |
| CO2 | ppm | <0.5 | <0.01 |
| SiF4 | ppm | <0.5 | <0.1 |
| SF6 | ppm | <0.5 | <0.1 |
| HF | ppm | <5 | 0.19 |
| Al | ppb | ≤10 | <0.020 |
| As | ppb | ≤10 | <0.001 |
| B | ppb | ≤10 | <0.005 |
| Ca | ppb | ≤5 | <0.200 |
| Cd | ppb | ≤2 | <0.001 |
| Cr | ppb | ≤10 | <0.020 |
| Fe | ppb | ≤10 | <0.007 |
| K | ppb | ≤5 | <0.100 |
| Mn | ppb | ≤10 | <0.001 |
| Na | ppb | ≤5 | <0.040 |
| Th | ppb | ≤0.1 | <0.001 |
| Ti | ppb | ≤10 | <0.002 |
| Li | ppb | ≤10 | <0.002 |
| U | ppb | ≤0.05 | <0.001 |
| Zn | ppb | ≤10 | <0.005 |
| Si | ppb | ≤10 | <0.100 |
| Pb | ppb | ≤10 | <0.001 |
| P | ppb | ≤2 | <0.300 |
| Mg | ppb | ≤10 | <0.020 |
| Ni | ppb | ≤20 | <0.030 |
| Cu | ppb | ≤5 | <0.005 |
| Mo | ppb | ≤10 | <0.001 |
| Total impurities of other metal | ppb | ≤500 | <0.0010 |
Company Details
Business Type:
Manufacturer,Distributor/Wholesaler,Agent,Exporter,Trading Company,Seller
Year Established:
2018
Total Annual:
1000000-5000000
Employee Number:
50~150
Ecer Certification：
Active Member
We are a leading industrial gas manufacturer dedicated to providing high-quality gases and innovative solutions for various industries. We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers i... We are a leading industrial gas manufacturer dedicated to providing high-quality gases and innovative solutions for various industries. We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers i...
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