SHANGHAI FAMOUS TRADE CO.,LTD
| Payment Terms | T/T |
| Delivery Time | 2-4 weeks |
| Packaging Details | package in 100-grade cleaning room |
| Maximum service temperature | >1700°C |
| Thermal conductivity | ≥120 W/(m·K) |
| Mohs hardness | 9.5 |
| Coefficient of thermal expansion | 4.0~5.0×10⁻⁶/K |
| Elastic modulus | 410 GPa or higher |
| Applications | Semiconductor Manufacturing, Industrial Kilns and Energy |
| Brand Name | ZMSH |
| Model Number | SiC Vertical Furnace Tube |
| Certification | rohs |
| Place of Origin | CHINA |
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Product Specification
| Payment Terms | T/T | Delivery Time | 2-4 weeks |
| Packaging Details | package in 100-grade cleaning room | Maximum service temperature | >1700°C |
| Thermal conductivity | ≥120 W/(m·K) | Mohs hardness | 9.5 |
| Coefficient of thermal expansion | 4.0~5.0×10⁻⁶/K | Elastic modulus | 410 GPa or higher |
| Applications | Semiconductor Manufacturing, Industrial Kilns and Energy | Brand Name | ZMSH |
| Model Number | SiC Vertical Furnace Tube | Certification | rohs |
| Place of Origin | CHINA |
High-Purity SiC Vertical Furnace Tube High-Temperature Resistant
A Silicon Carbide (SiC) Vertical Furnace Tube is a high-performance ceramic structural component manufactured using processes such as reaction sintering or chemical vapor deposition (CVD). It is specifically designed for extreme environments in semiconductor manufacturing, metallurgy, and high-temperature industries. By leveraging the core material properties of silicon carbide—high hardness, high stiffness, low thermal expansion, high thermal conductivity, and excellent chemical stability—it maintains exceptional dimensional stability (with a coefficient of thermal expansion as low as 4.0-5.0×10⁻⁶/K) and structural integrity under conditions exceeding 1700°C, in corrosive atmospheres, and during rapid temperature changes. It provides a reliable material solution for high-temperature processes.
| Feature Category | Core Advantage | Key Parameters/Performance |
| High-Temperature Stability | Extremely low thermal expansion, high temperature resistance
| Coefficient of thermal expansion 4.0~5.0×10⁻⁶/K (-196°C to 1600°C), maximum service temperature >1700°C |
| Thermal Management | Excellent thermal conductivity, rapid temperature equalization
| Thermal conductivity ≥120 W/(m·K) (room temperature), ~45 W/(m·K) (1200°C) |
| Mechanical Strength | High hardness, high stiffness, resistance to deformation
| Mohs hardness 9.5, elastic modulus 410 GPa or higher |
| Chemical Inertness | Resistance to acids, alkalis, and plasma erosion
| Corrosion rate in strong acid (70% HNO₃) and strong alkali (45% KOH) <0.2 mg/(cm²·h) |
| Service Life & Reliability | Thermal shock resistance, long life, low maintenance
| Withstands thermal shock testing from 1200°C to room temperature (quenching) while maintaining structural integrity, and exhibits dimensional deviation <0.1mm after continuous operation for 2 years in industrial scenarios |
Q1: What is the primary application of a silicon carbide (SiC) vertical furnace tube?
A1: It is primarily used as a high-temperature reactor tube in semiconductor diffusion furnaces, CVD systems, and industrial kilns (e.g., for SiC/GaN epitaxial growth, oxidation, or annealing processes at 1500–1700°C), providing exceptional thermal stability and corrosion resistance in extreme environments.
Q2: Why choose silicon carbide over traditional materials for vertical furnace tubes?
A2: Silicon carbide offers superior high-temperature strength (up to 1700°C), extreme thermal shock resistance (low CTE ~4.5×10⁻⁶/K), and excellent chemical inertness (resisting acids, alkalis, and plasma erosion), ensuring long service life, minimal maintenance, and stable performance in corrosive atmospheres like HCl or metal vapors.
Tags: #SiC Vertical Furnace Tube, #High-Purity, #Customized, #SiC Ceramics, #High-Temperature Resistant
Company Details
Business Type:
Manufacturer,Agent,Importer,Exporter,Trading Company
Year Established:
2013
Total Annual:
1000000-1500000
Ecer Certification：
Verified Supplier
SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi... SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi...
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