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SHANGHAI FAMOUS TRADE CO.,LTD

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China SiC Horizontal Furnace Process Tube High Thermal Conductivity​​
China SiC Horizontal Furnace Process Tube High Thermal Conductivity​​

  1. China SiC Horizontal Furnace Process Tube High Thermal Conductivity​​
  2. China SiC Horizontal Furnace Process Tube High Thermal Conductivity​​
  3. China SiC Horizontal Furnace Process Tube High Thermal Conductivity​​

SiC Horizontal Furnace Process Tube High Thermal Conductivity​​

  1. MOQ: 25
  2. Price: By case
  3. Get Latest Price
Payment Terms T/T
Delivery Time 2-4 weeks
Packaging Details package in 100-grade cleaning room
Coefficient of Thermal Expansion ~4.5×10⁻⁶/°C
Thermal Conductivity ~45 W/(m·K) (@1200°C)
Flexural Strength >250 MPa
Mohs Hardness 9.5
Working Atmosphere Oxygen, nitrogen, hydrogen chloride, etc.
Chemical Stability Resists acid/alkali and plasma erosion
Brand Name ZMSH
Model Number SiC Horizontal Furnace Tube
Certification rohs
Place of Origin CHINA

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Product Specification

Payment Terms T/T Delivery Time 2-4 weeks
Packaging Details package in 100-grade cleaning room Coefficient of Thermal Expansion ~4.5×10⁻⁶/°C
Thermal Conductivity ~45 W/(m·K) (@1200°C) Flexural Strength >250 MPa
Mohs Hardness 9.5 Working Atmosphere Oxygen, nitrogen, hydrogen chloride, etc.
Chemical Stability Resists acid/alkali and plasma erosion Brand Name ZMSH
Model Number SiC Horizontal Furnace Tube Certification rohs
Place of Origin CHINA

SiC Horizontal Furnace Tube Brief

 

SiC Horizontal Furnace Process Tube High Thermal Conductivity​​

 

 

 

A Silicon Carbide (SiC) Horizontal Furnace Tube is a high-performance ceramic tube manufactured using ​​reaction sintering or chemical vapor deposition (CVD) processes​​, specifically designed for ​​high-temperature and corrosive industrial environments​​. It serves as a ​​process tube​​, operating in atmospheres containing ​​oxygen, nitrogen, and trace hydrogen chloride​​, with a typical working temperature of ​​1250°C​​ and the capability to withstand even higher temperatures. Its core value lies in leveraging the intrinsic properties of silicon carbide—​​extremely high hardness, high stiffness, low coefficient of thermal expansion, high thermal conductivity, and exceptional chemical stability​​—to ensure ​​outstanding dimensional stability, structural integrity, and long service life​​ under extreme conditions of heat, corrosion, and thermal shock. This provides a reliable high-temperature processing environment for advanced industries such as ​​semiconductor manufacturing and metallurgy​​.

 

 


 

SiC Horizontal Furnace Tube Parameters

 

​​Parameter Category​​ ​​Parameter Name​​ ​​Typical Value/Range​​ ​​Significance​​
​​Material Characteristics​​ Coefficient of Thermal Expansion ~4.5×10⁻⁶/°C

​​Extremely low thermal expansion​​ ensures dimensional stability at high temperatures and excellent thermal shock resistance.

 

Thermal Conductivity ~45 W/(m·K) (@1200°C)

​​High thermal conductivity​​ facilitates rapid temperature equalization and reduces thermal gradients.

 

Flexural Strength >250 MPa

​​High mechanical strength​​ resists deformation and ensures structural stability.

 

Maximum Service Temperature >1700°C (oxidizing atmosphere)

​​Resistance to extreme temperatures​​ adapts to high-temperature industrial environments.

 

Mohs Hardness 9.5

​​High hardness​​ endows the component with ​​exceptional wear resistance and long life​​.

 

​​Functional Characteristics​​ Working Atmosphere Oxygen, nitrogen, hydrogen chloride, etc.

Adapts to ​​process atmospheres​​ common in semiconductor and photovoltaic industries.

 

Chemical Stability Resists acid/alkali and plasma erosion

​​Excellent chemical inertness​​ suitable for harsh chemical environments.

 

 

 


 

SiC Horizontal Furnace Tube Applications

 

Silicon Carbide Horizontal Furnace Tubes play a critical role in multiple high-end manufacturing sectors due to their superior performance:

 

  1. ​​Semiconductor Manufacturing​​: Used in processes such as ​​diffusion, oxidation, and chemical vapor deposition (CVD)​​ to carry and heat-treat silicon wafers, ensuring ​​process purity and uniformity​​.
  2. ​​Photovoltaic Industry​​: Applied in production lines for ​​high-efficiency solar cells (e.g., TOPCon, HJT)​​, supporting silicon wafers in LPCVD equipment for ​​passivation layer deposition, diffusion, and annealing​​.
  3. ​Metallurgy and High-Temperature Processing​​: Serves as a furnace tube in ​​non-ferrous metal smelting (e.g., aluminum, copper) and steel manufacturing​​, withstanding corrosion from molten metals and high-temperature loads.
  4. ​​Industrial Kilns​​: Used in ​​tunnel kilns and shuttle kilns​​ as ​​high-temperature furnace tubes or kiln furniture​​, enhancing operational efficiency and service life.

 

 


 

SiC Horizontal Furnace Tube Characteristics

 

  • 3D printed integrated forming​​

  • ​​Base material impurity content <300 ppm​​

  • ​​CVD silicon carbide coating base material impurity content <5 ppm​​

  • ​​High thermal conductivity​​

  • ​​High thermal shock stability​

 

 

 

 


 

Customized SiC Ceramic Components of ZMSH

 

 

ZMSH supports ​​precision custom machining​​ of various silicon carbide (SiC) ceramic products. Whether for special dimensions, complex structures, or specific performance requirements, we can achieve them through processes such as ​​reaction sintering, pressureless sintering, and chemical vapor deposition (CVD)​​. If you have needs for silicon carbide ceramic component design, material selection, or application scenario adaptation, please feel free to inquire. We will provide ​​technical solutions and rapid response services​​.

 

 

 

 


 

SiC Horizontal Furnace Tube FAQ

 

Q1: What is the primary application of a silicon carbide horizontal furnace tube?​​

​​A1:​​ It is primarily used in ​​high-temperature processes​​ (up to 1700°C) within ​​semiconductor manufacturing and photovoltaic industries​​, such as ​​diffusion, oxidation, and chemical vapor deposition (CVD)​​, ensuring precise thermal treatment and coating uniformity for wafers and solar cells.

 

 

​​Q2: Why choose silicon carbide over traditional materials for horizontal furnace tubes?​​

​​A2:​​ Silicon carbide offers ​​exceptional thermal stability (low CTE ~4.5×10⁻⁶/℃), high thermal conductivity (~45 W/m·K at 1200°C), and superior chemical inertness​​, enabling ​​longer service life, reduced maintenance costs, and reliable performance in corrosive atmospheres​​ (e.g., oxygen, nitrogen, HCl) compared to quartz or metal alternatives.

 

 


Tags: #​​SiC Horizontal Furnace Tube, #CVD Coating, #High-Purity, #Customized, #SiC Ceramics​​, #Process Tube, #High Thermal Conductivity​​

 
  
 

Company Details

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  • Business Type:

    Manufacturer,Agent,Importer,Exporter,Trading Company

  • Year Established:

    2013

  • Total Annual:

    1000000-1500000

  • Ecer Certification:

    Verified Supplier

    SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014.    We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi...     SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014.    We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi...

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  • SHANGHAI FAMOUS TRADE CO.,LTD
  • Room.1-1805,No.1079 Dianshanhu Road,Qingpu Area Shanghai city, China /201799
  • https://www.galliumnitridewafer.com/

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