SHANGHAI FAMOUS TRADE CO.,LTD
| Payment Terms | T/T |
| Supply Ability | 1000pcs per month |
| Delivery Time | 5-8weeks |
| Packaging Details | Package in 100-grade cleaning room |
| Diameter | 4 inch (100mm) |
| Thickness Range | 0.5mm~1.5mm |
| Surface Roughness (Polished) | ≤0.5nm |
| Transmittance @193nm | >93% |
| CTE (20-300°C) | 0.55×10⁻⁶/°C |
| Parallelism | ≤3μm |
| Brand Name | ZMSH |
| Model Number | 4 Inch Quartz Wafer |
| Certification | rohs |
| Place of Origin | CHINA |
View Detail Information
Explore similar products
Fused Quartz Tubes Optical Glass Tubes SiO2 Tubes Transparent Pipe JGS1 JGS2
SiO2 Crystal Fused Quartz Plate 2inch 6inch High Hardness Quartz Glass
120 X 120mm Fused Quartz Plate Customized Square Shape For Electronic Light
6Inch Diameter 150mm Quartz Crystal Glass Wafer 5N Purity SiO₂
Product Specification
| Payment Terms | T/T | Supply Ability | 1000pcs per month |
| Delivery Time | 5-8weeks | Packaging Details | Package in 100-grade cleaning room |
| Diameter | 4 inch (100mm) | Thickness Range | 0.5mm~1.5mm |
| Surface Roughness (Polished) | ≤0.5nm | Transmittance @193nm | >93% |
| CTE (20-300°C) | 0.55×10⁻⁶/°C | Parallelism | ≤3μm |
| Brand Name | ZMSH | Model Number | 4 Inch Quartz Wafer |
| Certification | rohs | Place of Origin | CHINA |
| High Light | 4 Inch Fused Silica Wafer ，Fused Silica Wafer for Semiconductor ，100mm Fused Silica Wafer | ||
The 4-inch quartz wafer (100mm) is a large-format, ultra-high-purity fused silica substrate designed for high-precision, high-stability applications in semiconductors, optoelectronics, and advanced optics. Compared to 3-inch wafers, the 4-inch specification offers significantly greater usable area, improving production efficiency—particularly for batch manufacturing of IC photomasks, high-power laser optics, and MEMS sensors.
ZMSH specializes in the R&D and production of 4-inch and larger quartz wafers, offering:
- Full-size customization: Supports 4-inch, 6-inch, and 8-inch wafers, with non-standard sizes (e.g., square, sector-shaped) available.
- High-precision processing: Includes double-side ultra-polishing (Ra≤0.5nm), laser dicing (±0.01mm tolerance), and micro-hole/special-shaped via drilling.
- Functional treatments: Anti-reflective (AR) coatings, IR anti-reflection, diamond-like carbon (DLC) coatings, and more.
- Industry-grade solutions: Semiconductor-level cleanliness (Class 10), low defect density (≤0.1/cm²), ideal for EUV lithography and quantum computing.
| Technical Term | Specification |
| Diameter | 4 inch (100mm) |
| Thickness Range | 0.5mm~1.5mm |
| Surface Roughness (Polished) | ≤0.5nm |
| Transmittance @193nm | >93% |
| CTE (20-300°C) | 0.55×10⁻⁶/°C |
| Parallelism | ≤3μm |
| Vacuum Compatibility | 10⁻¹⁰ Torr |
1. Large-size precision: TTV≤10μm at 100mm diameter ensures process uniformity.
2. Ultra-low CTE: 0.55×10⁻⁶/°C, suitable for high-temperature processes (e.g., annealing, ion implantation).
3. Broadband transparency: >93% transmittance @193nm (DUV), >90% @3-5μm (IR).
4. Superior surface quality: Double-side polished with Ra≤0.5nm for nanoscale lithography.
5. Enhanced durability: Optional chemical strengthening boosts flexural strength to 600MPa; plasma-resistant.
| Field | Applications |
| Semiconductor | EUV lithography optics, photomask substrates, 3D NAND interposers |
| High-power Lasers | Laser mirrors, pulse compression gratings, fiber laser endcaps |
| Quantum Technology | Qubit chip carriers, cold atom trap viewports, single-photon detector substrates |
| Aerospace | Satellite lenses, radiation-resistant sensor windows, particle detectors |
| Biomedical | DNA sequencing chips, endoscope optics, microfluidic device molds |
ZMSH provides end-to-end customization for 4-inch quartz wafers, including:
- Material selection: JGS1/JGS2 UV-grade or IR-grade fused silica.
- Precision machining: Nanoscale polishing (λ/20), laser microstructuring (±1μm accuracy).
- Functional coatings: AR (193-1064nm), high-LIDT laser coatings (>5J/cm²).
- QA support: Full inspection reports (AOI, interferometry).
1. Q: What is the typical thickness tolerance for 4-inch quartz wafers?
A: Standard 4-inch (100mm) quartz wafers maintain ±0.02mm thickness tolerance across the 0.5-1.5mm range, ensuring uniformity for semiconductor lithography processes.
2. Q: Why choose 4-inch over 6-inch quartz wafers for MEMS applications?
A: 4-inch wafers provide optimal cost-efficiency for small-to-medium MEMS production runs while maintaining better process control than smaller diameters.
Tag: #3 Inch Quartz Substrate, #Customized, #Fused Silica Plates, #SiO₂ Crystal, #Quartz wafers, #JGS1/JGS2 Grade, # High-Purity, #Fused Silica Optical Components, #Quartz Glass Plate, #Custom-Shaped Through-Holes, #4Inch Quartz Wafer, #Diameter 100mm, #Semiconductor Manufacturing
Company Details
Business Type:
Manufacturer,Agent,Importer,Exporter,Trading Company
Year Established:
2013
Total Annual:
1000000-1500000
Ecer Certification：
Verified Supplier
SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi... SHANGHAI FAMOUS TRADE CO.,LTD. locates in the city of Shanghai, Which is the best city of China, and our factory is founded in Wuxi city in 2014. We specialize in processing a varity of materials into wafers, substrates and custiomized optical glass parts.components wi...
Get in touch with us
Leave a Message, we will call you back quickly!